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Overview | |
Horizontal Performance | |
Traverse length - X Min / Max | 0.1mm to 50mm (0.004in to 1.97in) |
Traverse / measuring speeds | 10mm/s (0.39in/s) max - 1mm/s (0.039in/s) |
Data sampling interval in X | 0.5 μm (20 μin ) |
Straightness error (Pt) | 0.4 μm over 50 mm (16 μin over 1.96 in) |
0.2 μm over any 20 mm (8 μin over any 0.78 in) | |
Vertical Performance | |
Nominal measuring range (Z) | 1mm (0.04in ) |
Resolution (Z) | 16nm @ 1mm range (0.63 μin @ 0.04 in) |
3nm @ 0.2mm range (0.12 μin @ 0.008 in) | |
Range to resolution ratio | 65,536 : 1 |
Stylus arm length, tip size, force | 60mm arm, 2μm radius conisphere diamond stylus, 1mN force |
System Performance | |
Spherical calibration artifact | 12.5mm (0.49 in) nominal radius |
Calibration uncertainty - Pt | < 0.25μm (10 μin) |
Radius measurement uncertainty | 0.1 - 12.5mm (0.004 - 0.5 in) = 2% to 0.04% of nominal |
12.5 - 25mm (0.5 - 1in) = 0.04% of nominal | |
25 - 1000mm (1 - 39.4in) = 0.04% to 0.2% of nominal | |
Angle measurement uncertainty | within 1% of measured angle (+ / - 35º maximum range) |
Parameter height uncertainty | within 2% + 6nm (0.24μin) (peak parameters only) |
Dimensions L x D x H | Traverse unit - 343 x 116 x 160mm (13.5 x 4.6 x 6.3in) |
Control module - 285 x 200 x 80mm (11.2 x .9 x 3.2in) | |
Weight | Traverse unit - 4.9Kg (10.8lbs) |
Control module - 1.9Kg (4.2lbs) | |
Environment notes | |
Storage temperature | 5ºC to 40ºC (41ºF to 104ºF) |
Storage humidity | 10% to 80% Relative, non condensing |
Operating temperature | 15ºC to 30ºC (59ºF to 86ºF) |
Temperature gradient | < 2ºC (< 3.6ºF) per hour |
Operating humidity | 45% to 75% Relative, non condensing |
Maximum RMS floor vibration | 2.5 μm/s (100 μin/s) at < 50Hz |
5.0 μm/s (200 μin/s) at > 50Hz | |
Electrical supply | 110/220/240V - 50/60 Hz |
Power consumption | 10VA traverse unit / 18VA processor |
Safety | EN 61010 - 1 : 2001 |
EMC | EN 61000 - 6 - 4 : 2001 |
EN 61000 - 6 - 1 : 2001 | |
Note: Taylor Hobson pursues a policy of continual improvement due to technical developments. We therefore reserve the right to deviate from catalog specifications. |
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