System performance | 2000 | 2000E | 2000S |
Calibration Form Error (Pt) | < 0.20 μm (8 μin) | ||
System noise | Rq < 2 nm (0.08 μin), Rz < 10 nm (0.39 μin) | ||
Radius measurement uncertainty | 0.1 - 10mm (0.004 - 0.39in) - < 1μm of nominal | ||
10 - 360mm (0.39 - 14.17in) - 0.01% to 0.006% of nominal | |||
Inclination measurement uncertainty | 0.5 arc minute | ||
Repeatability of Z axis indication | Flat surface - 0.08 μm (3.1 μin) | ||
Curved surface - 0.08 μm (3.1 μin) | |||
Horizontal performance | 2000 | 2000E | 2000S |
Traverse length – X max / min | 120 mm / 0.1 mm (4.7 in / 0.004 in) or 200 mm / 0.1 mm (7.9 in / 0.004 in) | ||
Traverse speeds | 13 mm/s (0.51 in/s) max | ||
Measuring speed | 0.25 mm/s, 0.5 mm/s, 1 mm/s & 2 mm/s (0.01 in/s, 0.02 in/s, 0.04 in/s & 0.08 in/s) | ||
Minimum data sampling interval in X | 0.125 μm (5 μin) | ||
Straightness accuracy (Pt) | 120 mm Traverse unit - 0.08 μm (3.2 μin) / 200 mm Traverse unit - 0.110 μm (4.3 μin) | ||
X axis indication accuracy | (1 + 0.02 L) μm | ||
Vertical performance | 2000 | 2000E | 2000S |
Nominal measuring range (Z) | 20 mm (0.79 in) | ||
Resolution (Z) | 5.3 nm (0.21 μin) | 1.3 nm (0.05 μin) | 0.3 nm (0.01 μin) |
Range to resolution | 3,773,585 : 1 | 15,384,615 : 1 | 66,666,666 : 1 |
Linearity accuracy | 0.07 + 0.03 Z [mm] μm | ||
(3 + 30 Z[in] μin) | |||
Stylus arm length | Standard length 100mm | ||
Tip size | 2μm radius conisphere diamond | ||
Force | < 1mN | ||
Measuring station | 2000 | 2000E | 2000S |
Motorized tilting of traverse unit | Optional ±9° from horizontal | ||
Instrument weight | 223 Kg (450 mm column) (optional 700 mm column 237 Kg) | ||
Motorized vertical column | 450 mm (17.7 in) (optional 700 mm (29.5 in)) | ||
Environment | Electrical supply | ||
Storage temperature | 5 ºC to 40 ºC (41 ºF to 104 ºF) | Supply type | Alternating supply, single phase with earth (3-wire system) |
Storage humidity | 10% to 80% relative, non condensing | Instrument and computer voltage | 90 V - 230 V |
Operating temperature | 18 ºC to 22 ºC (64 ºF to 72 ºF) | Frequency | 47 Hz to 63 Hz |
Temperature gradient | < 2 ºC per hour (< 3.6 ºF / hour) | Supply voltage transients – width | EN 61000 - 4 - 4 : 1995 |
Operating humidity | 45% to 75% relative, non condensing | Power consumption | 500 VA |
Maximum RMS floor vibration | 3 μm/s (120 μin/s) at < 50 Hz | Safety | EN 61010 - 1 : 2001 |
6 μm/s (200 μin/s) at < 50 Hz | EMC | EN 61000 - 6 - 4 : 2001 EN 61000 - 6 - 1 : 2001 |
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