Measurement system | |||||
Models | LuphoScan 120 | LuphoScan 260 | LuphoScan 420 | ||
Machine type | 4-axis (3 mechanical bearings, 1 air bearing) | ||||
Measurement principle | Scanning point interferometry | ||||
Sensor technology | Fibre optics based multi-wavelength interferometer (MWLI® ) | ||||
Scanning mode (3D) | Spiral, equidistant, normal | ||||
Measurement volume (diameter x height) | 120 mm x 75 mm | 260 mm x 75 mm | 420 mm x 100 mm | ||
Maximum tilt | 90° | ||||
Reference system | 3 MWLI® sensors | ||||
Invar frame | |||||
1st order R, Z, T axis error compensation | |||||
Object parameters | |||||
Surface shapes | Aspheric, spheric, flat, slight freeform | ||||
Surface finish | Polished, rough, transparent, specular, opaque | ||||
Reflectivity range | 0,5 % ... 100 % | ||||
Spherical departure | Unrestricted (object sensor follows ideal profile) | ||||
Maximal diameter with 90° slope | 25 mm | 75 mm | 105 mm | ||
Maximum object diameter | 120 mm | 260 mm | 420 mm | ||
Maximum object weigh |
15 kg | 25 kg | 50 kg | ||
Machine characteristics | |||||
Object mount | Hydraulic expansion chuck (HD25 or HD40), optional: 3-jaw chuck (D = 22…200 mm) | ||||
Internal data rate | 2500 Hz | ||||
Wavelength range |
1530 nm ... 1610 nm |
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Laser classification | Class 1 | ||||
Continuous wave output (CW), < 1 mW | |||||
Machine dimensions (w x d x h) | 70 cm x 85 cm x 186 cm | 85 cm x 100 cm x 186 cm | 100 cm x 115 cm x 186 cm | ||
Machine weight | 325 kg | 450 kg | 600 kg | ||
Compressed air requirement | 6..10 bar, 20 litre/min | ||||
Electrical power requirement | 230 VAC, 50/60 Hz, < 700 W | ||||
Measurement characteristics | |||||
Accuracy (2σ) (angle of incidence ≤ ± 1°) |
polished | Ra < 1 μm | 1 μm ≤ Ra ≤ 3 μm | ||
± 50 nm | ± 250 nm | ± 1 μm | |||
Longitudinal resolution | 0.1 nm | ||||
Spotsize | 4 μm | ||||
Lateral resolution (points per mm2) | (adjustable:) 0.1 ... 2×105 | ||||
Data handling | |||||
Parameter input | Aspheric coefficients (even, uneven) | ||||
Measurement data | 3D, 2D linescan | ||||
Data export formats | 3D | Zygo MetroPro XYZ, X,Y,Z,dN (ASCII, binary), X,Y,Z,dZ (ASCII, binary) |
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2D | Taylor Hobson MOD, Taylor Hobson PRF, X,Z,dN (ASCII, binary), X,Z,dZ (ASCII, binary) |
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Data analysis | 3D surface visualisation, adjustable cross-section, 2D graphics, filtering (LPF, HPF, Gaussian), best-fit radius, aspheric fit, PV, RMS, tangential & radial errors, measurement report (PDF) |
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