Horizontal Performance | Environment notes | |
Traverse length - X Min / Max | 0.1mm to 50mm (0.004in to 1.97in) |
Storage temperature Storage humidity Operating temperature Temperature gradient Operating humidity Maximum RMS floor vibration Electrical supply Power consumption Safety EMC Note: |
Traverse / measuring speeds | 10mm/s (0.39in/s) max - 1mm/s (0.039in/s) | |
Data sampling interval in X | 0.5μm (20μin ) | |
Straightness error (Pt) | 0.4μm over 50mm (16μin over 1.96in) 0.2μm over any 20mm (8μin over any 0.78in) |
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Vertical Performance | ||
Nominal measuring range (Z) | 1mm (0.04in ) | |
Resolution (Z) | 16nm @ 1mm range (0.63μin @ 0.04in) 3nm @ 0.2mm range (0.12μin @ 0.008in) |
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Range to resolution ratio | 65,536 : 1 | |
Stylus arm length, tip size, force | 60mm arm, 2μm radius conisphere diamond stylus, 1mN force | |
System Performance | ||
Spherical calibration artifact | 12.5mm (0.49in) nominal radius | |
Calibration uncertainty - Pt | < 0.25μm (10μin) | |
Radius measurement uncertainty | 0.1 - 12.5mm (0.004 - 0.5in) = 2% to 0.04% of nominal 12.5 - 25mm (0.5 - 1in) = 0.04% of nominal 25 - 1000mm (1 - 39.4in) = 0.04% to 0.2% of nominal |
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Angle measurement uncertainty | within 1% of measured angle (+ / - 35º maximum range) | |
Parameter height uncertainty | within 2% + 6nm (0.24μin) (peak parameters only) | |
Dimensions L x D x H | Traverse unit - 343 x 116 x 160mm (13.5 x 4.6 x 6.3in) Control module - 285 x 200 x 80mm (11.2 x .9 x 3.2in) |
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Weight | Traverse unit - 4.9Kg (10.8lbs) Control module - 1.9Kg (4.2lbs) |
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