Form Talysurf® PGI Series là dòng hệ thống đo và phân tích độ nhám, biên dạng đa năng sử dụng công nghệ giao thoa sóng laser cho kết quả siêu chính xác
Overview | |||
System performance | 2000 | 2000E | 2000S |
Calibration Form Error (Pt) | < 0.20 μm (8 μin) | ||
System noise | Rq < 2 nm (0.08 μin), Rz < 10 nm (0.39 μin) | ||
Radius measurement uncertainty | 0.1 - 10mm (0.004 - 0.39 in) - < 1 μm of nominal | ||
10 - 360mm (0.39 - 14.17 in) - 0.01% to 0.006% of nominal | |||
Inclination measurement uncertainty | 0.5 arc minute | ||
Repeatability of Z axis indication | Flat surface - 0.08 μm (3.1 μin) | ||
Curved surface - 0.08 μm (3.1 μin) | |||
Horizontal performance | 2000 | 2000E | 2000S |
Traverse length – X max / min | 120 mm / 0.1 mm (4.7 in / 0.004 in) or 200 mm / 0.1 mm (7.9 in / 0.004 in) | ||
Traverse speeds | 13 mm/s (0.51 in/s) max | ||
Measuring speed | 0.25 mm/s, 0.5 mm/s, 1 mm/s & 2 mm/s (0.01 in/s, 0.02 in/s, 0.04 in/s & 0.08 in/s) | ||
Minimum data sampling interval in X | 0.125 μm (5 μin) | ||
Straightness accuracy (Pt) | 120 mm Traverse unit - 0.08 μm (3.2 μin) / 200 mm Traverse unit - 0.110 μm (4.3 μin) | ||
X axis indication accuracy | (1 + 0.02 L) μm | ||
Vertical performance | 2000 | 2000E | 2000S |
Nominal measuring range (Z) | 20 mm (0.79 in) | ||
Resolution (Z) | 5.3 nm (0.21 μin) | 1.3 nm (0.05 μin) | 0.3 nm (0.01 μin) |
Range to resolution | 3,773,585 : 1 | 15,384,615 : 1 | 66,666,666 : 1 |
Linearity accuracy | 0.07 + 0.03 Z [mm] μm | ||
(3 + 30 Z[in] μin) | |||
Stylus arm length | Standard length 100mm | ||
Tip size | 2μm radius conisphere diamond | ||
Force | < 1mN | ||
Measuring station | 2000 | 2000E | 2000S |
Motorized tilting of traverse unit | Optional ±9° from horizontal | ||
Instrument weight | 223 Kg (450 mm column) (optional 700 mm column 237 Kg) | ||
Motorized vertical column | 450 mm (17.7 in) (optional 700 mm (29.5 in)) | ||
Environment | Electrical supply | ||
Storage temperature | 5 ºC to 40 ºC (41 ºF to 104 ºF) | Supply type | Alternating supply, single phase with |
earth (3-wire system) | |||
Storage humidity | 10% to 80% relative, non condensing | Instrument and computer voltage | 90 V - 230 V |
Operating temperature | 18 ºC to 22 ºC (64 ºF to 72 ºF) | Frequency | 47 Hz to 63 Hz |
Temperature gradient | < 2 ºC per hour (< 3.6 ºF / hour) | Supply voltage transients – width | EN 61000 - 4 - 4 : 1995 |
Operating humidity | 45% to 75% relative, non condensing | Power consumption | 500 VA |
Maximum RMS floor vibration | 3 μm/s (120 μin/s) at < 50 Hz | Safety | EN 61010 - 1 : 2001 |
6 μm/s (200 μin/s) at < 50 Hz | EMC | EN 61000 - 6 - 4 : 2001 | |
EN 61000 - 6 - 1 : 2001 |
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